ENBIS-17 in Naples

9 – 14 September 2017; Naples (Italy) Abstract submission: 21 November 2016 – 10 May 2017

Special Session: Monitoring and Optimization of Semiconductor Processes

11 September 2017, 17:30 – 18:30

Statistical Modelling, Semiconductor Process Optimization and Control: The Integrate Experience
17:30 – 17:50 Giuseppe Garozzo (STMicroelectronics)

Integration of Atomistic Simulations and Statistical Modeling for the Accurate Process Control in Nano-Electronic Manufacturing
17:50 – 18:10 Antonino La Magna (Consiglio Nazionale delle Ricerche Istituto per la Microelettronica e Microsistemi, IMM-CNR), A. Campo (IMM-CNR), S.F. Lombardo (IMM-CNR), I. Deretzis (IMM-CNR), Giuseppe Garozzo (STMicroelectronics), G.G.N. Angilella (IMM-CNR)

Updating Monitoring Networks in Overlay Data Modelling
18:10 – 18:30 Riccardo Borgoni (University of Milano Bicocca)

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