ENBIS: European Network for Business and Industrial Statistics
Forgotten your password?
Not yet a member? Please register
ENBIS Spring Meeting 2017
28 – 30 May 2017; Monastery of Schlägl in Upper Austria Abstract submission: 11 November 2016 – 5 March 2017The following abstracts have been accepted for this event:
-
Assessing the Quality of Wafer Images
Authors: Sarah Karasek (Graz University of Technology), Herwig Friedl (Graz University of Technology), Peter Scheibelhofer (AMS Austria Microsystems AG)
Primary area of focus / application: Process
Secondary area of focus / application: Quality
Keywords: Process, Quality, Semi-conductors, Wafers
Submitted at 9-Mar-2017 17:28 by Sarah Karasek
Accepted
This can be done by considering the grayscale frequencies. The corresponding histogram shows up a clear multi-modal behaviour. That is why we assume a finite mixture distribution with component specific parameters to analyze the data. In some cases, a mixture of Gaussians works very well, whereas sometimes a mixture of Gammas performs even better. In order to find the maximum likelihood estimates of the location and scale or shape parameters we utilize the well-known EM algorithm.
Once we have estimates of the distribution of a single image, we are interested in how the image models vary over time during the production process. Thus it is planned to develop a routine which automatically detects relevantchanges in the image contrast. -
Using Decision Theory and Value of Information for Assessing Process Improvement Actions
Authors: Shawn Capser (Praxis Reliability Consulting)
Primary area of focus / application: Process
Secondary area of focus / application: Six Sigma
Keywords: Decision theory, Value of information, Expected utility, Bayesian inference, Copulas, Continuous improvement , Process improvement
Submitted at 20-Mar-2017 13:17 by Shawn Capser
Accepted