ENBIS-14 in Linz

21 – 25 September 2014; Johannes Kepler University, Linz, Austria Abstract submission: 23 January – 22 June 2014

Contributed Session: Multivariate Process Monitoring 1

22 September 2014, 15:40 – 17:10

Run-to-Run Profile Monitoring on Sensor Temporal Data for Tool Condition Diagnosis
15:40 – 16:00 Jakey Blue (École des Mines de Saint-Étienne), Jacques Pinaton (STMicroelectronics), Agnès Roussy (École des Mines de Saint-Étienne)

Robust Multivariate Process Control of Multi-Way Data in Semiconductor Fabrication
16:00 – 16:20 Peter Scheibelhofer (Institute of Statistics, Graz University of Technology), Günter Hayderer (ams AG), Ernst Stadlober (Institute of Statistics, Graz University of Technology)

Response Surface Approximation for Profile Monitoring in Circular Domains
16:20 – 16:40 Esperan Padonou (Ecole des Mines de Saint-Etienne, STMicroelectronics), Olivier Roustant (Ecole des Mines de Saint-Etienne), Jakey Blue (Ecole des Mines de Saint-Etienne), Hugues Duverneuil (STMicroelectronics)

Challenges of Virtual Testing in Statistical Quality Control of Railway Ballast
16:40 – 17:00 Vera Hofer (Department of Statistics, University of Graz), Holger Bach (Petromodel Ltd., Reykjavik)

Discussion
17:00 – 17:10

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